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Fields Medical Life Sciences Information Communication Environment Nanotechnology / Materials Energy Manufacturing Technology Social Infrastructure Frontier Liberal Arts Themes Researchers JP Top Nanotechnology / Materials Design, fabrication and test of high performance miniaturized sensor and actuator systems Design, fabrication and test of high performance miniaturized sensor and actuator systems JAPANESEINQUIRY update：2020/06/16       NEXT PREV Features and Uniqueness Micro and nano electro-mechanical systems (MEMS/NEMS) have completely changed human society in the past decades. Many devices that are taken for granted these days like smart phone, future car and drone would be unthinkable without them. The integration of various new kinds of materials, such as metallic glass and nanostructures into micro technologies allows us to create devices with novel performance and characteristics; examples include acoustic sensors and actuators, thermoelectric generators and wafer level packages. In collaboration with partners inside and outside Tohoku University, technologies are being developed that can be transferred to industry ranging from material integration and processes to packaging and reliability. Practical Application Wide collaboration in Microsystem technology is possible. We develop, implement and optimize processes, devices and systems until they are ready for use, keeping in mind reliability, yield and other important features for commercialization. We work with also with partners, such as Fraunhofer. Flexible interlinking of expertise and capacities with other research groups enables us to meet broad project requirements and create complex system solutions. Keywords MEMS Metallic Glass Microfabrication Wafer Level Packaging Sensor Actuator Researchers Micro System Integration Center Froemel Joerg Eckhardt, Associate ProfessorDoctor of Engineering researchmap researchmap Browsing History Common Keywords Electromagnetic Nondestructive Inspection System for Complicated Structures [ 高木敏行 教授 ] Minimally Invasive Medical Devices and Healthcare Devices Using Micro/Nano Machining Technology [ 芳賀 洋一 教授 ] Hands-On Access Fabrication Facility –Open Facility for MEMS and Semiconductor Prototyping– [ 戸津 健太郎 教授 ] MEMS/Micromachines and Microfabrication Technology [ 田中 秀治 教授 ] Development of Passive Millimeter-wave Imaging Device for Practical Applications [ 佐藤 弘康 助教 ] Lymph node metastasis prediction and treatment evaluation system [ 小玉 哲也 教授 ] User Who Reviewed This Content Also Reviewed Biomarker Development and Preemptive Therapy of Alzheimer's Disease [ ARAI Hiroyuki Professor ] The Novel Ultrasound Irradiation Device [ Katsunori Nonogaki Professor ] INSTRUMENT AND METHOD FOR ANALYZING METABOLIC CONDITION OF LIVING BODY AND RECORDING MEDIUM [ Katsunori Nonogaki Professor ] Research Profiles ©TOHOKU UNIVERSITY How to Use FAQ For Researchers Site Policy [jp] ©TOHOKU UNIVERSITY Fields Medical Life Sciences Information Communication Environment Nanotechnology / Materials Energy Manufacturing Technology Social Infrastructure Frontier Liberal Arts Fields Themes Researchers 日本語 ENGLISH Close